电子管栅极表面处理技术的研究-电子与信息工程专业论文.pdf.docxVIP

目录第一章 前 言 .................................................................................................................. 11.1 本课题研究背景 ....................................................................................................... 11.2 本课题研究的目标及意义 ....................................................................................... 21.3 国内外发展动态和趋势 ........................................................................................... 31.4 本课题主要研究内容 ............................................................................................... 5第二章 电子管栅极涂覆材料和工艺 ............................................................................ 62.1 引言 ........................................................................................................................... 62.2 栅极表面涂覆材料 ................................................................................................... 72.2.1 金 ....................................................................................................................... 82.2.2 钛 ....................................................................................................................... 92.2.3 锆 ....................................................................................................................... 92.2.4 碳 ....................................................................................................................... 92.2.5 钽 ..................................................................................................................... 102.2.6 铂 ..................................................................................................................... 102.3 栅极表面涂覆工艺 ................................................................................................. 122.3.1 电镀工艺及原理 ............................................................................................. 132.3.2 喷涂工艺 ......................................................................................