折衍二元光学元件模压技术研究-光学工程专业论文.docx

A主份的环氧树脂的刻蚀比为1：2．78。此刻蚀速率和刻蚀比适于对微结构的刻蚀转移。在硫系红外玻璃模压部分，论文研究分析了不同的模压温度和加热方式对模压结果的影响。实验最终确定模压参数，模压部分分为升温过程和降温过程。升温过程为：首先由室温经过40rain升温至200℃并保温20min，然后经过40min升温至350℃保持20min，最终再经40min升温到至430℃后加压9。6kg并保持30min。降温过程为：首先随炉冷却至350℃保持2小时以消除应力，再经过6小时后炉温由350℃降至110℃，此时开炉取出样片。实验结果良好：红外玻璃填充完全，微结构完整，经接触式测量仪测量所得衍射微结构尺寸符合要求，误差在0．03％以下，粗糙度在8．10nto。关键词：衍射光学元件；模压制造；红外玻璃；ICP刻蚀万方数据ResearchonMoldingTechnologyofRefractive-·diffractiveOpticalElementsDiscipline：OpticalEngineeringStudentSignature：肌丘吁SupervisorSignature：。buU“俨1AbstractAddingdiffractiveopticalelementsintheinfraredimagingsystem，notonlycanreducethe size andweightofthesystem，butalsomakesthesystem uniquefunctionofde-dispersionandathermalization．Currently，thesinglepointdiamondturningtechnologyisthemainmanufactureprocessingforinfrareddiffractiveopticalelement．Thoseelementshaven’tyettorealizemassproductionandlarge—scaleapplications．Therefore，itisnecessarytostudyanewprocesstechnologyforthemassproductionofinfrareddiffractiveopticalelement．Therefore，thisthesispresentsthemoldingmanufacturetechnologyofinfrareddiffractiveopticalelement．Themainprocessofmoldingmanufactureinfrareddiffractiveopticalelementsthatisstudiedin this thesisisaSfollows：Firstly,useahardanti-stickmoldmoldedtheheat-softenedinfraredglassintheuniformheatingvacuumenvironmentandmaintainedasuitabletime，andthenremovedthepressure．Finally,wegottheinfrareddiffractionopticalelementsafterapresettingannealingcoolingprogram．ThehardmoldthatisusedformoldinginfraredglassisSimold，whichismadebysinglepointdiamondturning．Inaddition，theSimoldWasusedasmaStermask，wefirstlytransferedthediffiactionmicrostructuretotheepoxyresinresistetching layeronSiCbasebythemicromoldingtechnology,andthentransferedthe diffraction microstructmetothebasethroughtheICPetchingtoproducetheSiCmoldwithhigherhardnessandlongerservicelife．InSiCmoldmanufacturing，thepaperstudiesprocessparametersofthepolymercorrosionresistantlayermicrostructuremoldingandtheICPetchingtransfermicrostructure．Inpolymercorrosionlayermicrostructuremoldin