压电喷墨打印头喷墨腔室制作工艺研究-机械设计及理论专业论文.docx

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2018-05-05 发布于上海
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压电喷墨打印头喷墨腔室制作工艺研究-机械设计及理论专业论文.docx

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压电喷墨打印头喷墨腔室制作工艺研究-机械设计及理论专业论文

压电喷墨打印头喷墨腔室制作StudyontheFabricationofInkChamberforPiezoInkjetPrintheadAbstractTheapplicationofinkjetprintingtechnologyhasspreadfromtraditionaltocommercialprimingandotherfields，suchasflexibleintegratedcircuit，electrochemical cells，bio-cellprinting．Theinkchamberisasignificantpartofapiezoinkjetprinthead，butthefabricationprocessofinkchamberiscomplex，time·consumingandreliantonspecialequipment．ThispaperdescribesafabricationmethodforinkchamberbasedonSU一8dryfilmlaminationwhichissimpleandonlycommonequipmentisneeded．Thefollowingisthemainresearchcontentsinthepaper．(1)ThematerialforfabricatinginkchamberWasselected．ThethicknessofnozzleplateWasoptimized．ByanalyzingthecharacteristicofthecommonmaterialsinMEMS，theSU-8negativephotoresistwaschosentofabricationtheinkchamberasitsexcellentphysicalandchemicalproperties．Accordingtothepiezoelectricvibratoryplatetheoryandthefluidtheory，thethicknessofthenozzleplateWasoptimizedandthestressnozzleplatesufferedduringtheinkjetprocessWasanalyzedbynumericalsimulationinCOMSOLsoftware．(2)AmethodtofabricatetheinkchamberforpiezoinkjetprintheadbydryfilmlaminationWaspresented．Themechanicalbehaviorofpolymerduringthebondingprocessandinterfaceadhesionmechanismofpolymerwereanalyzed．Themainparametersofthelaminationprocesswereoptimized．Thebondingtemperatureof60。Candthedryfilmthicknessof20“mwerechosentoachieve100％bondingrateand92．5％rateofthroughnozzle．AndoxygenplasmaprocessWasoptimizedatRFpowerof40Wandtimeof25Stoimprovethedryfilmlaminationstrength．(3)FabricationprocessofinkchamberforpiezoinkjetprintheadWasillustratedindetail．Byimprovingthespincoatingfixtureandparametersofspincoating，thethicknesserrorofSU-8causedbyedgebeadwasreduced．TheinnerstressofSU一8generatedduringthebakingprocesswasdecreasedbythesoftbaketemperaturerisinganddroppingslowly，andPEBwas takingatalowtemperatureinsteadofrecommendedtemperature．ThePDMSsheetWas chosenasthesubstrateofthedryfilm．The20p．mthickdryfilmwiththeexposuredoseof189-210mJ／cm2andthePEBtemperatureof65。Candtimeof10minachievedthehighest