基于碳纳米管的nems开关的设计、仿真及工艺研究-机械设计及理论专业论文.docxVIP

文着重研究了不同驱动电压下开关的位移，并进一步得到器件的 PULL-IN 电压。利用 ANSYS 中耦合场分析的三种重要方法，分别对 NEMS 开关进行建模分析， 并比较三种方法的优缺点。三种方法分别是基于 MFS(Multi-field (TM) Solver)的顺 序耦合法，基于三维 ROM144 单元的降阶模型(ROM)方法和基于 TRANS126 单元 的直接耦合法。ANSYS 的三种耦合场分析方法各有所长，可以根据研究重点的不 同加以选择。根据研究需要，分别建立和研究了悬臂梁式 NEMS 开关以及两端固 定式 NEMS 开关的模型。此外，着重分析了有限运动学（大变形）对 NEMS 开关 性能的影响。仿真结果表明，大变形会大大增加两端固定式的 NEMS 开关的 pull-in 电压，而对于悬臂梁式 NEMS 开关的影响较小。通过对比，我们还可以看到开关 的尺寸参数（如半径、长度）和材料性质的变化对开关性能变化的影响。仿真结 果可以较好地与理论值吻合，说明有限元仿真分析在 NEMS 设计中的可行性。关键词：碳纳米管、NMES 开关、有限元、大变形、pull-in 电压ABSTRACTAs the extension and development of MEMS, Nano-electromechanical systems (NEMS) is drawing more and more attention because of the unprecedented and intriguing properties in the fields of sensing and electronic computing. NEMS based devices can have an extremely high fundamental mechanical oscillation frequency, while preserving a robust mechanical response. Carbon nanotubes (CNTs) are ideal materials for NEMS devices due to their superior electromechanical properties, such as low masses, low density, high intensity and high natural frequency. Nanotube based nanoswitch will have superior properties which MEMS switch don’t have.In this paper a multiphysics simulation of nanotube based nano-electromechanicalsystems is reported. Assuming continuum mechanics, the nonlinear deformation of the nanotube is simulated using finite element method. We try three simulation methods in ANSYS and do some comparison. They are based on MFS, ROM144 and TRANS126 separately. The simulation emphasizes the behavior of singly and doubly clamped nanotubes under electrostatic actuation and the prediction of the pull-in voltage of the nanoswitch, a key design parameter. Moreover, the nonlinear behavior associated with finite kinematics (i.e., large deformations), neglected in previous studies, are investigated in detail. The multiphysics simulation results agree well with the theoretical predictions verifying that the numerical model is valid. The results show that nonlinear kinematics results in an