微机械电容式加速度传感器测试电路研究.pdfVIP

第 19 卷 　第 6 期 传 感 技 术 学 报 Vol . 19 　No . 6 2006 年 12 月 CH IN ESE J OU RNAL OF SEN SORS AND A C TUA TOR S Dec . 2006 Detecting Circuits f or the Micro Accelerometer with Capacitance Detection YA N G M i aom i ao , C H E N D ey ong , WA N G J u nbo , C H E N J i an , W U Zengw ei , C H E N L i ( ) S t ate Key L ab of T rans d ucer Technology , I ns t it ute of elect ronics , Chi nese aca demy of sciences , B eij i ng 100080 , Chi na Abstract :Due to t he p ara sitic cap acit ance and weak outp ut signal , w hich i s limit ed by it s dimen sion s , it i s difficult to imp rove t he re solution and st abilit y of micro accelero met er efficient ly . Two mo st pop ular met h o ds on t he mea surement of tiny cap acit ance signal are di scu ssed an d co mp ared , and a novel ameliorat ed ca p acit ance det ecting circuit i s p ropo sed . A micro machined cap acitive accelero met er i s develop ed and mea s ured wit h t he novel det ecting app roach . The re sulting sen sitivit y i s about 1. 63 V/ gn , and a cap acit ance re solution of 10 - 17 F can be achieved . Key words :silicon cap acitive accelero met er ; weak cap acit ance det ection ; differential mea surement EEACC :7230 ;7320 E 微机械电容式加速度传感器测试电路研究 杨苗苗 , 陈德勇 , 王军波 ,陈　健 ,毋正伟 , 陈　李 ( 中国科学院电子所 传感技术国家重点实验室 ,北京 100080) 摘 　要 :在测量硅微电容式加速度传感器时 , 由于器件信号的微弱和寄生电容的干扰 ,提高加速度的稳定性和分辨率非常困难. 针对这种情况 ,作者分析对比开关性和调制解调型两种常见微弱电容检测方法优缺点 ,并提出了一种微电容检测的改进电路 ,用 此电路对电容式加速度传感器进行了测试. 数据表明,微加速度计灵敏度为 1. 63 V/ gn ,可以检测到 10 - 17 F 量级的电容值. 关键词