原创力文档基于探针轨迹运动的微加工装置建立及实验分析-establishment and experimental analysis of micromachining device based on probe trajectory movement.docxVIP
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基于探针轨迹运动的微加工装置建立及实验分析-establishment and experimental analysis of micromachining device based on probe trajectory movement
AbstractDuetothesmallsize,highintegrationandthespeedofanalysisofMicro-fluidicchip,ithasshowngreatdevelopmentpotentialinthefieldsofmedicine,biologyandchemistryandbecomeannewresearchfieldofinter-disciplineofmechanical,biologyandchemistry.ThefabricationofMicro-fluidicchiphasthefocusofacademicsattention.Micro-fluidicchipiscomposedofmanymicro-channelunitswiththeverysmalldimension,andsoisdifficulttobeprocessedbycommonmethods.Currently,themethodsformanufacturingthemicro-channelssuchasmicro-milling,vibrationassistedmilling,photolithographytechnologyandprobe-basedtrajectoryprocessingtechnologyhavesomed
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