基于音圈电机的多自由度主动减振系统分析-analysis of multi-degree-of-freedom active vibration reduction system based on voice coil motor.docxVIP

AbstractVibration, temperature and pollution constitute the three main factors of the ultra-precision machining. Vibration is almost everywhere in the processing field. Especially in the high-speed high-finishing occasions, vibration becomes the main factor that affect the machining accuracy of the system.The traditional vibration control method can not work well when the frequency of the vibration interference is less than or equal to the natural frequency of the processing system. And to the complex random variation interference, passive vibraion rejection system can not do well either due to the fixed structural parameters in it. So we researched the active vibration control system.In this paper, the active vibration rejection system increase a voice coil motor(VCM) actuator in the passive one. The vibration signal of the vibration control target that measured by the acceleration sensor inputed to the controller after analyzed and processed, which can generates driving signal of the actuator. The actuator can output a force(or torque) or displacement with the control of the driving signal, which can counteract or suppress the vibration displacement response of the vibration control target to achieve the purpose of vibration rejection. Active vibration rejection system can track the vibration signal of the object in real time because of the vibration signal measuring system, which can reject or control the object’s vibration in real time. So the active vibration rejection system can control the vibration with established frequency, and it can also control the vibration with frequency of random variation, which overcome the shortage of the passive vibration rejection system.The active vibration rejection system with 6 degree of freedom based on VCM we researched can reject the vibration interference in both the horizontal direction and the Vertical direction and at the same time, the vibration control in these two directions is independent and decoupled, which make