CH01(part1) 1.0 Basic Wavefront Aberration Theory For Optical Metrology 光学检测教材课程.pptVIP

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CH01(part1) 1.0 Basic Wavefront Aberration Theory For Optical Metrology 光学检测教材课程.ppt

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1.0 Basic Wavefront Aberration Theory For Optical Metrology ;The Principal purpose of optical metrology is to determine the aberrations present in an optical component or an optical system.光学测量的主要目的：光学元件或系统 To study optical metrology the forms of aberrations that might be present need to be understood.可能存在的像差形式;For most optical testing instruments, the test result is the difference between a reference (unaberrated) wavefront and a test (aberrated) wavefront.检测设备检波像差 We usually call this difference the Optical Path Difference (OPD).波像差的形成原因，基本形式，怎样消除呢？;1.1 Sign Convention;The distance is positive if measured from left to right. The angle is positive if it is in counterclockwise direction relative to Z axis.与工程光学上不一样吧！;Finite conjugate;;For aberration free system, the PSF will be the square of the absolute of the Fourier transform of a circular aperture and it is given in the form of 1st order Bessel function.;The fraction of the total energy contained in a circle of radius r about the diffraction pattern center is given by：;r;Generally a mirror system will have a central obscuration. If e is the ratio of the diameter of the central obscuration to the mirror diameter d, and if the entire circular mirror of diameter d is uniformly illuminated, the power per unit solid angle is given by好像讲的是遮挡率问题; ,? is in lp/mm;Features： Mirrors aligned on axis Advantages： Simple and achromatic消色差的 Disadvantages： Central obscuration and lower MTF Smaller FOV with long focal length;;Defocus;;;;;1.4 Transverse and Longitudinal Aberration;Wavefront aberration is the departure of actual wavefront from reference wavefront along the RAY.;1.5 Seidel Aberrations;;If look at the optical system from the rear end, we see exit pupil plane and image plane.;Wavefront Aberration Expansion;Classical Seidel Aberrations;W000;W000;Field Curvature;Distortion;Astigmatism;Coma;Warren Smith, Modern Optical Engineering, P65;+;Through-focus Diffraction Image (With Spherical Aberration);Wavef