河北工业大学物理专业英语.docVIP

A a-Si (amorphous silicon) a-Si(非晶硅) Amorphous means lacking distinct crystalline in material structure’s term. 非晶材料不同手段缺乏结晶性结构的术语。 Amorphous silicon film has the quality that can be used as material of semiconductor. 非晶硅薄膜有素质,可以用作半导体材料。 It can be formed by using plasma CVD equipment under temperature of 400 degree C. Therefore, it is the major material for manufacturing TFT of LCD panel, which uses glass substrate with active matrix. 它可以形成采用等离子CVD设备在温度400度c。因此,它是主要的材料制造的TFT液晶屏,采用玻璃基片与活跃的基体。 a-Si TFT (amorphous Silicon Thin Film Transistor ) a-Si TFT(非晶硅薄膜晶体管) The Field Effect typ