乐甫波传播特性与液体介电常数传感分析-analysis of love wave propagation characteristics and liquid dielectric constant sensing.docx

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乐甫波传播特性与液体介电常数传感分析-analysis of love wave propagation characteristics and liquid dielectric constant sensing.docx

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乐甫波传播特性与液体介电常数传感分析-analysis of love wave propagation characteristics and liquid dielectric constant sensing

图表清单图1.1声表面波器件·················································································································2图1.2兰姆波器件·····················································································································3图1.3乐甫波器件·····················································································································4图2.1乐甫波器件坐标系··········································································································8图2.2声波的IDT激发和接收示意图······················································································9图2.3叉指换能器(IDT)的结构··································································································9图2.4常规乐甫波建模流程图·································································································18图2.5(a)d/λ=0.01时36oYXLiTaO3广义乐甫波表面有效介电常数曲线·····························23图2.5(b)d/λ=0.2时36oYXLiTaO3广义乐甫波表面有效介电常数曲线·······························23图2.5(c)d/λ=1时36oYXLiTaO3广义乐甫波表面有效介电常数曲线··································23图2.6(a)d/λ=0.01时X112oYLiTaO3广义乐甫波表面有效介电常数曲线·····························24图2.6(b)d/λ=0.2时X112oYLiTaO3广义乐甫波表面有效介电常数曲线······························24图2.7(a)d/λ=0.1时PZT-5H/TiO2常规乐甫波表面有效介电常数曲线···································25图2.7(b)d/λ=1时PZT-5H/TiO2常规乐甫波表面有效介电常数曲线·····································25图2.8d/λ=0.01时36oYXLiTaO3广义乐甫波表面有效介电常数曲线放大图······················26图2.9(a)d/λ=0.1时PZT-5H/SiO2表面有效介电常数曲线······················································27图2.9(b)d/λ=1时PZT-5H/SiO2表面有效介电常数曲线·························································27图2.1036oYXLiTaO3广义乐甫波传播模态曲线··································································29图2.11PZT-5H/TiO2常规乐甫波传播模态曲线·····································································29图2.1236oYXLiTaO3广义乐甫波频散特性曲线··································································30图2.13PZT-5H/TiO2常规乐甫波频散特性曲线······································································30图