六硼化镧薄膜的制备及发射特性分析-preparation and emission characteristics analysis of lanthanum hexaboride thin films.docxVIP

ABSTRACTABSTRACTCathode is the key component of electron source. As the extensive application of the electron source in various fields, the electron source has become more important. Accordingly, the requirement of the cathode is increasingly high. People need the high emission current density and good quality electron beam source to obtain electron beam in high brightness. People have used many methods to make the cathode, in recent years, the film-cathode method that coated with the films of other materials on the substrate has gradually become the focus of the cathode around the world. The film-cathode method can utilize the physical and structural characteristics of the substrate, and can utilize physical and chemical properties of the film materials. So, it is an effective method in improving the performance of the cathode.Film-cathode is the method that the films of other materials are coated on the surface of the cathode to further reduce work function of the cathode. Therefore, the choice of the materials is important, the dissertation mainly consider some important factors of materials, for example, the work function, the conductivity, the density, the thermal stability, and the chemical stability. As the excellent quality materials of cathode emission, lanthanum hexaboride(LaB6)has many advantages, for example, high melting point, the resistance of ion bombardment, anti-oxidation, the high thermal conductivity, the high electrical conductivity, and the excellent chemical and physical stability. So, LaB6 has become the ideal film material in preparation of the film-cathode.In the dissertation, the LaB6 films is deposited on rhenium and silicon spindt arraysby electrophoresis and electron beam evaporation. The electrophoretic deposition techniques, electron beam evaporation processes and silicon spindt arrays preparation processes are researched respectively. The dissertation gets more scientific process parameters. The samples of multi-crystal LaB6 films co