高加速精密运动平台建模及控制关键技术分析-modeling and control key technology analysis of high-speed precision motion platform.docxVIP

AbstractChip packaging plays an important role in Integrated Circuit industry. And high acceleration precision motion stage is the core moving plant in chip packaging equipment. With development of techniques, in IC packaging, the chip size gets smaller and smaller, the distance between the leads gets smaller and smaller, however the production efficiency is required much higher, all of these require the motion stage have got higher velocity, higher acceleration and higher positioning accuracy. These indicators make the motion stage design and relevant theoretical research on control system faced a great challenge.Based on the self-developed high acceleration precision motion stage, aimed to movement typical operating conditions, this dissertation analyzed the characteristics of permanent magnetic synchronous linear motors, and researched on the key techniques of model identification and control system design to realize stage positioning fast and high precisely.First part, considering the high acceleration precision motion stage is driven by linear motors directly, analyzed the thrust fluctuation of linear motor, modeled the friction model of the motion stage, and identified the model parameters. And then the model structure of the motion stage is estimated. Andthe model parameters were identified with the frequency response method，andverify the effectiveness of the model.Second part, researched on the key control techniques based on the model of the motion stage. Trajectory planning is carried out by an asymmetric S planning curve which can suppress the vibration. Zero phase error tracking feedforward controller is designed according to the closed loop identification of the system which can improve the tracking accuracy and to compensate the time delay impact of systems. Disturbance observer is used in speed loop to achieve the parameter uncertainty and interference suppression with PID control. Position loop uses PID control to achieve the trajectory tracking. T