电子显微分析 Scanning Electron Microscopy （SEM） 课件.ppt

电子显微分析Scanning Electron Microscopy (SEM) 6.1 Inelastic Scattering Electron diffraction and TEM imaging mainly use elastic scattering electrons SEM imaging mainly use inelastic scattering electrons EDS (in TEM and SEM) and EELS (in TEM) also use inelastic scattering electrons Inelastic scattering electrons generate Characteristic X-ray Used for EDS in TEM and SEM Secondary electron Slow secondary electron Used for SEM imaging (morphology) Auger Electron Used for surface analysis Others Energy-loss transmitted electron Used for EELS in TEM Backscattered electron Used for SEM imaging (composition) Characteristic X-ray If more than a critical amount of energy is transferred to an inner shell electron, that electron is ejected. e.g. an K shell electron is ejected from the atom by a high-energy electron, leaving a hole in the K shell. When the hole in the K shell is filled by an electron from L shell, characteristic Ka X-ray emission occurs. The energy of the characteristic X-ray is characteristic of the difference in energy of the two electron shells involved. If we fill a K-shell hole from the L shell we get a Ka X-ray. If we fill a K-shell hole from the M shell we get a Kb X-ray. In microanalysis we only use the most intense lines, usually the Ka X-ray. Secondary electrons Secondary electrons (SEs) are electrons in the specimen that are ejected by the incident electron. They can be discussed as two distinct groups: Slow secondary electrons Fast secondary electrons Slow secondary electrons (SEs) If the electrons are in the conduction or valence bands, it doesn’t take much energy to eject them. They are called “slow SEs” energies of SE: ~ 50eV. SEs are not associated with a specific atom and so they contain no specific elemental information. Because SEs are weak they can only escape if they are near the specimen surface (5-10nm). So we use them in SEMs for forming images of the specimen surface. The number of SEs is dependent on the angle between