Easy Cluster - 4Phase：简单的集群-相位.ppt

Kornic Systems Corporation EasyGem?2.4 Technology Summary for SECS Communication Introduction EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments. Advantages Easy to build : Defined using Configuration File or GUI Easy to extend : GEM Definition options to change functionality. ( ex : 200mm - 300mm, Increased Modules ) Easy to debug : Comprehensive history and communication data logfiles ( Host-Gem, Gem-Equip, Error, Debug Message file ) High Reliability and Flexibility : Multiple OEM installs in varied End User facilities Features User Configuration Files Debugging Files Architecture System Requirements Generic Equipment Model(GEM) Generic Equipment Model(GEM) Supported SEMI Standards SEMI E5-0301 SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI E30-1000 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E37-0298 High-Speed SECS Message Services (HSMS) Generic Services SEMI E37.1-96E High-Speed SECS Message Services Single – Session Mode (HSMS-SS) SEMI E39-0600 Object Services Standard : Concepts, Behavior, and Services (OSS) SEMI E40-0301 Standard for Processing Management (PJM) SEMI E42-0299E Recipe Management Standard: Concepts, Behavior, and Service(RMS) SEMI E84-0301 Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO) SEMI E87-0301 Provisional Specification for Carrier Management (CMS) SEMI E90-0301 Specification for Substrate Tracking(STS) SEMI E94-1000 Provisional Specification for Control Job Management(CJM) SEMI E99-1000E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services Semi Standard Compliance Semi Standard Compliance Semi Standar