磁浮式补偿器结构设计及特性分析-structural design and characteristic analysis of maglev compensator.docxVIP

哈尔滨工业大学工程硕士学位论文哈尔滨工业大学工程硕士学位论文-- PAGE IV -AbstractThe ultra-precision positioning stage is use of the macromicro-drive techno logy to meet the high-speed and precision positioning requirements. During opera ting, the positioning accuracy of the ultra-precision positioning stage depends on the accuracy of chuck(micro-stage). But the gravity of chunk and its load, and the disturbance of system actuators and ground caused by noise limits the precisi on accuracy of the ultra-precision positioning stage. To solve these problems, a g ravity-compensation and local vibration isolation technology of chunk is developi ng. The principle of technology is flotation or magnetic levitation to compensatin g gravity and achieving horizontal and vertical low stiffness to prevent disturbanc e, and the vertical drive motor in Lorentz law to realize the movement of chunk. Research on the gravity compasation and vibration absorber of ultra-precision p ositioning stage will provide a high-precision positioning with strong protection.This paper summarizes the analysis of gravity compensation and vibration is olation technology in ultra-precision positioning stage from the research institute l ocal and abroad. On the basis of that, the function and indicators of magnetic c ompensator is determined and according it the structure of magnetic compensator is designed in detail. Computer simulation and experiments is taken to verifying the indicators. Specific content includes:On the basis of the macromicro-drive technology and vibration analysis of a single degree of freedom system, the magnetic compensator functions and i ndicators is determined. And it proposed a magnetic compensator design, the use of permanent magnet pole reach a permanent magnet structure design. Accordin g to the vertical motor characteristics, a Loren