石墨烯太赫兹探测器设计与加工关键技术-key technologies of graphene terahertz detector design and processing.docxVIP

areproducedwiththeZnOnanowiresphysicalmask.UsingtheCMOSprocessingtechnology,thegrapheneterahertzdetectorprototypeisfabricated.④Thetestsystemofthegrapheneterahertzdetectorisstudiedandbuilt,theperformanceofthedetectoristested.Keywords：terahertz,graphene,nanoribbons,p-i-n,dielectrophoresis,ZnOnanowires,Oxygenplasmaetching目录中文摘要..........................................................................................................................................I英文摘要........................................................................................................................................II1绪论......................................................................................................................................11.1研究背景...................................................................................................................................11.2太赫兹探测器国内外研究现状...............................................................................................21.2.1相干探测技术....................................................................................................................21.2.2直接探测技术....................................................................................................................31.2.3基于石墨烯材料的太赫兹探测技术................................................................................71.3论文主要研究内容.................................................................................................................101.4本章小结.................................................................................................................................102石墨烯太赫兹探测器的基本理论.........................................................................112.1引言.........................................................................................................................................112.2石墨烯带隙调控机理.............................................................................................................112.2.1双层石墨烯能隙调控............