TiO2薄膜的制备及电学性能分析-材料物理与化学专业论文.docxVIP

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TiO2薄膜的制备及电学性能分析-材料物理与化学专业论文.docx

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TiO2薄膜的制备及电学性能分析-材料物理与化学专业论文

重庆大学硕士学位论文目录重庆大学硕士学位论文目录 PAGE PAGE IV 目录中文摘要 ······································································································ I 英文摘要 ····································································································· II 1 引言 1 1.1 薄膜材料概述 ···························································································1 1.2 二氧化钛薄膜概述 ····················································································2 1.2.1 二氧化钛的结构 ····················································································2 1.2.2 二氧化钛薄膜的性质和应用 ·····································································3 1.2.3 二氧化钛薄膜制备方法 ···········································································5 1.2.4 溅射镀膜简介 ·······················································································5 1.2.5 磁控溅射的基本原理 ··············································································6 1.3 电阻率概述 ······························································································6 1.3.1 薄膜的电阻率意义和方法·········································································7 1.3.2 薄膜电阻率测量方法 ··············································································8 1.4 二氧化钛薄膜的相关研究现状 ·································································· 11 1.5 论文的研究目的和意义 ············································································ 11 1.6 论文的主要研究内容 ··············································································· 12 2 TiO2 薄膜的制备 13 2.1 制备薄膜的基本步骤 ··············································································· 13 2.1.1 基片的清洗 ························································································ 13 2.1.2 溅射用的靶材 ····················································································· 14 2.1.3 镀膜的步骤 ····························································