基于经验模态分解的精密光学表面中频误差识别方法-Core.PDF

49 1 Vol.49 No.1 2013 1 JOURNAL OF MECHANICAL ENGINEERING Jan. 2013 DOI 10.3901/JME.2013.01.164 * ( 361005) (Power spectral density, PSD)Fourier TG58 Mid-spatial Frequency Error Identification of Precision Optical Surface Based on Empirical Mode Decomposition BI Guo GUO Yinbiao YANG Feng (School of Physical and Mechanical Electrical Engineering, Xiamen University, Xiamen 361005) Abstract Mid-spatial frequency surface error of optical lens is crucial to the performance of high-energy laser systems and high-resolution optical systems. Power spectrum density (PSD) is generally employed to evaluate mid-spatial frequency error of optical surface. PSD is based on Fourier transform which averages local characters to the whole space. And it gives a whole evaluation of mid-spatial frequency error of optical surface. It not only weakens characters but also loses location information of surface error. Abrasive processing, such as grinding and polishing, always introduces local waviness with time-varying frequency on optical lens surface, PSD fails for this situation. A new error separation method, which is based on empirical mode decomposition, is introduced in this paper in order to more accurately evaluate mid-spatial