阀芯轴向尺寸配磨微进给闭环控制系统的研究-机械制造及其自动化专业论文.docxVIP

Classified Index: TP23 U.D.C.: 621 Dissertation for the Master Degree in Engineering RESEARCH ON MICRO-FEED CLOSED LOOP CONTROL SYSTEM FOR VALVE SPOOL AXIAL MATCH GRINDING Candidate: Supervisor: Academic Degree Applied for: Speciality: Affiliation： Date of Defence: Degree-Conferring-Institution: Li Yuefeng Prof. Wang guanglin Master of Engineering Mechanical Manufacturing and Automation School of Mechatronics Engineering June, 2008 Harbin Institute of Technology 摘要 摘要 - - I - 摘要 电液伺服阀是大量应用在航空、航天、航海等领域航行控制的电液伺服 控制系统中的关键元件，它的加工质量直接影响伺服控制系统的总体性能。 目前我国伺服阀生产一般属于单件小批量生产，尚未形成规模化生产，电液 伺服阀的制造工艺尺寸精度要求高，其加工普遍采用偶件配做的方式。因 此，伺服阀阀芯轴向配磨技术是伺服阀制造过程中的一项关键技术。 本文针对目前我国伺服阀阀芯轴向配磨领域的现状，研制了一套滑阀轴 向闭环控制配磨专用高精度自动化加工系统。在系统设计过程中，提出了三 套系统整体方案，通过各种方案之间的对比分析，确定选用了其中最优者。 在已确定的系统整体方案基础上，对压电陶瓷微进给装置的三个组成要素进 行了分析，选择了适合该系统的微进给方案。 该系统采用压电陶瓷微进给顶尖作为微进给装置，电感式高精度位移传 感器在线检测轴向磨削量，以单片机为核心的控制仪控制加工过程。按照电 液伺服阀阀芯轴向磨削加工工艺的要求，编写了控制程序，使之具有自动进 给、加工状态判断、加工完成后快速归位等功能，完成阀芯零件的轴向精密 配磨。 对系统进行了实验研究，结果证明该系统可以实现 40μm 的进给量，进 给监视行程达到 200μm，配磨误差预计在 0.5μm 之内，闭环检测分辨率达 0.1μm，并且可以根据工艺要求实现不同的进给速度。 关键词 伺服阀；配磨；微进给；在线检测 哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - II - Abstract Servovalve is the key part of the electro-hydraulic servo system widely applied in the navigating control fields, and its machining technology directly influences the total performance of servo system. Presently, servovalves are limited in Single and Mini-Batch Production, thus professional large scale production hasn’t come into being. Couple match method is usually adopted because the making technique of electro-hydraulic valve requires stricter dimension. Hence , the technology of servovalve core axial match grinding is one of key problems during servovalve manufacturing. According to the statue In the field of Chinas servovalve core axial match grinding areas, develop a set of servovalve core axial closed-loop control for high-precision grinding with automated micro-feed system. In the process of system design, three sets of systems are proposed. Through comparation