复杂激励作用下微纳谐振器非线性动力学特性研究-机械设计及理论专业论文.docx

万方数据 万方数据 IV - VI - - VIII - 上海交通大学硕士学位论文 复杂激励作用下微纳谐振器非线性动力学特性研究 摘 要 静电驱动是一种传统的谐振器驱动方式，其较好的稳定性和灵敏 度使得其广泛应用于各类谐振器中。近年来，光梯度力作为纳谐振器 的一种新型驱动方式，其优越的动力学特性，以及集光激励和光检测 为一体的优点，也得到了广泛关注。本文分析了光梯度力的固有非线 性特性、孔板间的静电力和压膜阻尼特性，并分别对光梯度力驱动圆 环与辐条谐振系统、复合材料梁谐振器和静电力驱动矩形孔状极板式 谐振器进行了动力学建模。利用多尺度法和有限元仿真方法进行分析 研究，研究表明： 1.光梯度力使系统呈现刚度软化效应，即随着入射光功率的增大， 圆环与辐条谐振系统稳态幅值明显增大，且谐振频率随着振幅的增加 而发生了较大偏移。基于立方刚度引起的系统刚度硬化现象，可以通 过调节入射光功率来实现圆环辐条谐振器的频率调节。 2.银和锗复合而成的两端固支梁间的光梯度力比普通材料梁间光 梯度力大两个数量级，并随着银的体积填充率的增大而逐渐减小。 3.在极板上穿孔会降低两极板间的压膜阻尼和静电力，分析静电 力驱动孔板振动的稳态响应曲线，结果表明：随着矩形孔径的增大， 压膜阻尼和静电力均减小，系统稳态幅值降低，刚度软化程度加深， 品质因数增大。 总之，本文的研究结论可以为光梯度力和静电力驱动微纳谐振器 的动力学分析与设计提供了理论参考和依据。 关键词：光梯度力、静电力、微纳谐振器、动力学分析、孔板 I - II - 上海交通大学硕士学位论文 STUDY OF NONLINEAR DYNAMIC CHARACTERISTIC OF RESONATOR UNDER COMPLEX ACTUATIONS ABSTRACT As a traditional driving method of resonators, Electrostatic actuation is widely used in all kinds of resonators for its good stability and high sensitivity. In recent years, Optical gradient force as a new way to drive resonators has attracted a lot of attention. The new actuation way has the advantages of excellent dynamic character and combination of optical actuation and optical detection. In this paper, the inherent nonlinear characteristics of the optical gradient force, electrostatic force and squeeze film damping between perforated plates are analyzed. The nonlinear dynamic models of the ring and spokes resonant system and nanoscale slot waveguides of hyperbolic metamaterial driven by optical gradient force and rectangular perforated plates driven by electrostatic force are proposed. Multiple scales method and finite element method are used and the research results show: The optical gradient force makes resonant system show a strong softening nonlinearity. The amplitude increases and the resonance frequency shifts as the input optical power increases. Moreover, the amplitude and resonance frequency of the nano-resonator decreases as the initial gap of the rings increases. Therefore, the resonance frequency can be