单色EL屏产业化中的工艺技术-半导体物理与半导体器件物理专业论文.docx

Abstract In 也is dissertation ，1 studied and solved some important technical problems being at commerciaIization of mono-EL display. At first，1introduced and discussed multi-layer TFEL about its physical performance and electroluminescence characteristics and showed the equivalent physicaI model. Then introduced chiefly mono-EL manufacturing line in 由.e American Lite Array lnc.，pointing out the main tcchnical keys being at manufacturing EL display，today. Due to TFEL displays suffer morc contrast loss in a strong 缸nbient light.Anaiy垣ngmainda臼d ways to improvc the contr剧， 1 studied and invented the black absorption layer，during which introducing reflection principle of optical film，describing care缸lly 也巳 ptocesshowωdesign and manufacture the absorption layer.The result is 由at the average reflection is reduced 企om 75% in the conventional TFEL display to about 4% in the ELD wi也 absorption layer.Furthet more，in order to realize the absorption layer in manufac阳ring ELD，1 gave a new Bi-Lay lift-off proc巳ss aft巳r 创al and error. From the analyse of theory and SEM-photographs of the example，the new process fits into the commercialization. Automation of manufacturing ELD is another technical key. In this dissertation，1 introduce the basic conception 缸J.d realization of PLC (Programmable Logical Controller) combining with Engineer-line of Lite Array，and showed the part of FPD (Flow Progr缸n Drawing). EL industry is a new one. How to choose and reform the original process and equipment for the manufac仙re of ELD is another goal. In this paper 1 discussed 也巳 equipment which originally designed for 吐le PCB (print Circle Bo町d) indus位yto meetthe 峭ter tolerances of ELD manufacturing. Beginning with improving the etching m世fom咀叨， 1carried out 也e reforrnation and made th巳m become the p町t of manufacturing the 企ont electrode of ELD. Finally ，也e developing tendency for ELD industry was given. 尊主组展产业也中的1艺技武研贸 第章寻|言 1 - 1 ELD ( Electroluminescence Display 电致发光屏)的历史与现状 材料、能源、信息是现实的物质生产力的三大要素