MoNxSiNx复合镀层的微观组织 力学与擦学性能研究.docxVIP

Title： Title： MICROSTRUCTURE，MECHANICAL AND TRIBOLOGICAL PROPERTIES OF MoNxlSiNx COMPOSITE COATINGS Major：Material Science Name：Tianxiang FAN slgnatu怕：：f釜2幽型 Supervisor：Pmf．GuojMR ZHANG s啪atu怕学～ ， c／ Abstract In this thesis，MoNx／SiNx multilayer coatings with different Si target current and MoNx coating were deposited by using direct current magnetron sputtering system．The influence of the changing of Si target current on the phase composition and micro-s咖c嘶of MoNffSiNx coatings were examined witll X-my diffraction、Atomic force microscope、Scanning electron microscope and Transmission electron microscope．The mechanical properties and tribological properties of MoNx／SiNx coatings were characterized by nano-indentation test,fracture toughness test。adhesion tests as well硒the friction and wealtests．The impacts of s缸ucture with different Si target current on properties of coatings were discussed． The phaSes of MoNffSiNx multilayer coatings were composed of 7-M02N and SiNx．Mo and Si in the transition layer is completed the transition to MoNx and SiNx and the multilayer smlcn耽began to appear in the transition layer．With the increaSe of Si target current,the modulation period of multilayer coatings and the thickness of SiNx monolayer are increaSing， and the modulation ratio(11=hMoNx／hsiNx)became smaller,the composite structure of MoNflSiNx multilayer coatings was transition nanocrystalline／nanocrystalline to nanocrystalline／amorphous．SiNx layers have been crystallized metastable s协lcnlre and grown coherently、)l，itll MoNx layers when the thickness Was less than 0．8nm, With the increase of the Si target current，the hardness and elaStic modulus of MONx／SiNx multilayer coatings decreased and then increased．However The劬cture toughness of the MoN#SiNx coatings decreased with increasing Si target current．The wear resistance of MoNffSiN。coatings better than MoNx coating．．The comparative analysis of the results showed that the performances of MoNffSiNx coating