高能电子束缩小投影曝光机标记信号检测及对准技术的研究-高电压及绝缘技术专业论文.docxVIP

摘 摘 要 T,e j6}’7 本论文介绍了电子束缩小投影曝光机标记信号检测及对准技术的相关系统 设计、流程设计、算法设计等，给出了实验数据和结果，实现了3 o为45 nm的 检测精度。 在电子束缩小投影曝光系统对准技术的原理实验中，介绍了电子束缩小投影 曝光机对准系统的构成及原理，阐述了数字处理技术在对准系统中的应用，以及 对准数据的产生及数字处理的软件设计，并给出实际测试结果。原理实验验证了 使用数字信号处理技术处理背散射电子(BSE)信号的可行性。 实验中设计出用于电子束缩小投影曝光机的标记对准模拟软件，采用多边形 面积变化来表示背散射信号幅值的变化。利用有向环计算多边形面积，并模拟出 标记对准的背散射信号，同时分析了不同标记图形所产生的BSE信号的特点， 设计出适用于缩小投影系统的掩模图形及相应的标记图形。 ／在缩小投影电子束曝光机上完成了对准标记重复检测精度的研究，检测系统 中使用了四象限的背散射电子检测器，提高了信号的信噪比，检测精度达到3 o =45 tim，制作了用于拼接的掩模图形及相应的标记图形，为拼接实验作了一定的 准备。p 【关键字】 电子束缩小投影曝光机，信号检测，对准技术，数字处理技术，模拟软件，标记 图形设计 The The Research Of Mark Signal Detection And Alignment Technology Used In High_。energy Projection Electron Beam Lithography System With Demagnification Imaging(PELDI) Shi，Qiang(High Voltage Technology) Directed by Zhang Fu’an Abstract The research of mark signal detection and alignment technology is introduced，which is used in high—energy Projection Electron Beam Lithography System With Demagnification Imaging(PELDI)，including relative system design，process design， and algorithm design．The experiment data ale given，and 45nm for 3 o is achieved as the result． Constitution and theory of alignment system used in PELDI are introduced in the theoretic experiment on the alignment technology．The application of digital process technology in the alignment is also descdbed．The data of alignment and software processing are discussed，and the results of practical tests are given．As the result，the feasibility ofusing digital signal process to deal with BSE signals is validated． The software of alignment simulation for PELDI is designed．The mathematical model and the arithmetic of the software are described．Two sorts of BSE signals are simulated as examples．The maSk image and the relative mark image ale designed according to the characteristic ofthe BSE signals from different mark images． At the end ofthe research，the expectant alignment precision is achieved，谢tll the use of new detection devices and the increased signal-to-nose ratio．The new mask and mark i