基于SPR原理的醇类气体含量检测研究-物理电子学专业论文.docxVIP

? 4  {IIIll[[I／I I[11 I[11 III j Y1 940303 Abstract Surfac：e Plasmon Resonance(short for SPR)technology is a new type of detection by detecting the variaOon of the refractive index of dielectric medium coated on the metal surface，which is a combined product of opfical，electrochemical and microelectronics fields etc．SPR has been widely and deeply studied in the fields of the surface nonlinear optical detection，membrane layer properties and sensors due to its desired characteristics of high sensitivity，real time monitor,label-free analysis and the strong capability of anti—electromagnetism． ● Ethanol gas is one kind of organic chemical products which is widely used in chemistry，bio-pharmacy and food industry．It has the characteristics of hi曲volatility and inflammability,which asks for a high requirement for detection quickly and safely． And SPR technology is applicable to detect the ethanol gas for its features of high sensitivity and selectivity． In this paper,preparation technology of Ti02 thin films was explored for many times using vacuum electron beam evaporating method,and the Ti02 thin films、析m different thickness were made．First,632．8 nl／l He-Ne laser was chosen as source and we had to eusure the SPR response curve by conducting angle scanning to the four- layered structure made of prisms，Cr，Gold and Ti02 using precision turntable device． We stopped the scanning when it came to the sharpest poillt of the amplitude slope curve，and then added a drop of ethanol晰血a certain concentration to the gas chamber - and simultaneously detected the variation of the amplitude in terms of time．From this experiment,SPR response curves obtained are well in accordance、析Ⅱl the theoretical fitting ones，the effect of the thickness of Ti02 thin film on detecting sensitivity of ethanol gas was initially studied． Keywords：Surface Plasmon Resonance；Ti02 thin film；Intensity modulation； Ethanol gas detection ．Ⅱ．  飞  。 ‘ 目录 目录 中文摘要 I ABSTRACT ． ．II 目录 III 物理量名称及符号表 ．VI 第1