双圆锥形圆弧刀刻划衍射光栅的槽形控制研究-机械制造及其自动化专业论文.docxVIP

摘 摘 要 衍射光栅是一种精密的光学元件，广泛地应用于各种现代光谱分析、精密测量中。 利用金刚石刻划刀在膜层上机械刻划衍射光栅，是一种不可替代的光栅制作方法。因 此，开展衍射光栅机械刻划理论及槽形控制技术研究是非常必要的。 针对金刚石弧形刻刀刻划衍射光栅的过程，本文建立了等效下压速度模型；根据 滑移线场理论，建立了光栅机械刻划过程的刻划深度模型，为铝膜蒸镀及刻刀定位提 供理论指导依据。 在压痕、划痕试验的基础上，测得铝膜属性，建立了光栅刻划的有限元模型；采 用Defom一3D有限元分析软件，对光栅槽形形成过程进行了模拟仿真，分析了刻划参 数、刀具参数对光栅槽形形成的影响规律。 采用正交试验方法，优化刻划参数、刀具参数，分析了铝膜材料流动规律以及刻 划载荷，提出了光栅槽形形成的控制策略。 最后，本文还根据金刚石刻划刀的磨损情况，进行了刀具金刚石定向设计，为大 面积衍射光栅刻划提供了长寿命刀具。 关键词：机械刻划光栅弧形刻划刀 刻划深度有限元正交试验金属流动规律 刀具磨损金刚石定向 ABSTRACTDi丘hction ABSTRACT Di丘hction gratiIlg is a precision opticaJ element，淅dely used iIl Various modem spectral analysis，precision meaSurement．The mechanically ruled伊ating in the矗lm by the diamond graVer is one u11replaceable manufacture method of dim．aCtion gratiIlg．Therefore， it is ve巧necessary to carry out tlleo巧research of me mechaIlically mled di债action grating and con昀l technology of the grating grooVe． According to t11e course of the mechaIlically mled grating by t11e circular graVer，mis paper establishes tlle model of equivalent i11dentation speed．Based on slip—line field meory， the matllematical model of mled depm is esta【blished．it provides tlle theory baSis for the aluIllinmn membraIle evaporation a11d the 蓼aVer orientation． BaSed on meaSured me aluminum film propenies by the indentation test and scratch test，the paper haS es切【blished me fiIlite element model of mled蓼atiIlg．The fIomling process of盯ating grooved haS been simulated by the finite element analysis sofhare Def．onn．3D，The influence mle of me scoring p猢eter a11d伊aVer p踟eter to廿le fomling process of gmting舒ooVe are analyzed． Using the orthogonal teSt m弛od，the scoring parameter and铲aVer parameter haVe been optimized．The aluminum membraIle material mobile mle has been a11alyzed，Scoring 10ad haS obtained．Contr01 strategy has been proposed about tlle fomling process of。grating grOOVe． Finally；According t0 diamond graVer wear condition，the orientation of diamond graVer is desi印ed，w11ich proVides long 1ife graVer forbig area di债ac_tion grating· Key words： mecha