材料磨损与微电子机械系统中的磨损现象.PDFVIP

( ) Journal of Mechanical Strength 机械强度 2001 ,23 4 :511～515 材料磨损与微电子机械系统中的磨损现象 MATERIAL S WEAR AND WEAR IN MICROEL ECTROMECHANICAL SYSTEMS 1 ,2 1 1 1 邓忠民 　 谢季佳 　周承恩 　洪友士 ( ( ) ) 1. 中国科学院力学研究所 非线性力学国家重点实验室 LNM ,北京 100080 (2 . 北京航空航天大学 宇航学院 ,北京 100083) 1 ,2 1 1 1 DEN G Zhongmin 　 XIE J ijia 　ZHOU Cheng ′en 　HON G You shi (1. State Key L aboratory of Nonlinear Mechanics , Institute of Mechanics , Chinese Academy of Sciences , Beij ing 100080 , China) (2 . School of Sp ace Technology , B eij ing University of A eronautics and Astronautics , B eij ing 100083 , China) 摘要 　磨损是材料和机械失效的主要原因之一 。本文介绍了近年来材料磨损性能研究的进展 ,磨损的几种破坏机 制以及相应的磨损理论模型 ,并介绍了MEMS 中磨损研究的现状 。 关键词 　磨损 　微电子机械系统 　研究现状 Abstract 　Wear is one of the main reasons of materials failure and mechanical failure . The mechanism of wear is complicated by several factors , such as microstructure change or phase transition of material surface , elastic and plastic mismatch of contact surface , residual stress , working environments and etc . This paper introduces the studies of materials ’wear properties in recent years , makes comparisons of several wear mechanisms and gives corresponding wear mo