变形反射镜红外光学薄膜分析光学工程专业论文.docxVIP

摘嘤变形反射镜红外光学薄膜研究 摘嘤 变形反射镜红外光学薄膜研究 摘 要 本论文从目前变形反射镜红外光学薄膜存在残余应力较大与表面缺陷多的 实际问题出发，对变形反射镜红外光学薄膜从残余应力、表商缺陷、优化设计、 制备工艺、参数测试等方．面进行了系统研究，霞点对薄膜表面缺陷进行了研究。 在薄膜残余应力方面，本论文提出了一种新的多层膜系统热应力模型，建立 了一个包含薄膜本征应力的薄膜残余应力分配预测模型，并建立了变形反射镜有 限元模型，利用1il『yko干涉仪，测鼍了YbF。ZnS和ZnSe等红外薄膜材料的应力， 以上所作工作对实际镀制变形反射镜红外光学薄膜具有很大的指导意义。 在薄膜表面缺陷方面，本论文建立了典型的节瘤与陷穴缺陷有限元模犁，对 其进行了温升与应力分析，讨论了薄膜缺陷的分类、特点、成因和作用．利用原 子力显微镜技术，重点对YbF；、ZnS单层薄膜缺陷以及YbF；／ZnS多层薄膜缺陷进 行了系统研究，提出了薄膜缺陷形成的物理原因。 最后，利用分光光度计、x射线衍射仪与扫描电子显微镜对镀制的变形反射 镜红外光学单层与多层薄膜进行了测量，结果显示，其性能指标满足使用要求。 本论文获得了一些关于变形反射镜红外光学薄膜的一些成果，不仅丰富了变 形反射镜的内容，而且对我国自适应光学系统研制具有较大的实用价值。 关键词变形反射镜，红外光学薄膜，薄膜缺陷，薄膜应力 中田ft学院光1U技术州7C所|埤f学竹论卫’2006The 中田ft学院光1U技术州7C所|埤f学竹论卫’2006 The study on infrared thin film of deformable mirror Abstract Based on the large residual stress and defect in present deformable mi玎on the key technology for the infrared thin film of deformable mirror have been studied in details，which includes the residual stress，surface defects，optimal design。the fabrication technique and the parameter testing，and the surface defect is main studied， in this paper． The model ofthermal stress in optical multiplayer systems has been studied．and a new calculated method of theoretical predicted model of residual stress distribution is put forward in this paper The FEA model of deformable mirror is built and the residual stress is applied on the model，and the residual stresses in infrared thin film of deform曲le mirror iS calculated．The stress of the infrared thin film materials．such as YbFs，ZnS and ZnSe，has been measured in the use ofthe Vecco interferometer．These theory models caB_use the base of deposition the infrared thin film of deformable mirror． The nodule and concave hole defects ale simulated by FEA．and the temperature ring and thermal stress are simulated，The classification，the properties，the cause and the effects of the defects in infrared thin film of deformable mirror have been discussed．The morphology of defects of single ZnS，YbF3 thin film and mulfilayer YbF3／ZnS thin film the have b