纳米铝膜等效介电常数和磁导率的有限元模拟.pdf

20 9 2010 9 Vol.20 No.9 The Chinese Journal of Nonferrous Metals Sep. 2010 1004-0609(2010)09-1809-06 1 2 3 (1. 410083 2. 110001 3. 410083) / Ansoft’s HFSS TM / (S ) S Al / X : TG111 A Effective dielectric constant and magnetic permeability of nano Al films by finite element simulation 1 2 3 FAN Zhi-liang , LIU Zhi-min , ZHENG Feng (1. School of Physical Science and Technology, Central South University, Changsha 410083, China; 2. Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110001, China; 3. School of Materials Science and Engineering, Central South University, Changsha 410083, China) Abstract: A calculation model of nanosized Al films/dielectric multilayers was established, By using finite element software Ansoft’s HFSS™, the electromagnetic scattering parameters of metal-dielectric composite layer structure were simulated. The effective dielectric constant and permeability of nanosized metallic films were calculated through S parameter retrieval