基于MEMS和可见光读出的微梁陈列传感器和探测系统-固体力学专业论文.docxVIP

中国科学技术大学硕士学位论文 中国科学技术大学硕士学位论文 ABSTRACT Much attention has been paid to thermal irradiation detectors for their wide applications．The uncooled thermal irradiation detector technology has increased the interest in thermal irradiation sensors since the requirements of compact．10w—cost and reliable sensors can be met using this technology．The main property of the microbolometer iS to respond to the themlal radiation by changing its resistance． Recently．2D thermal imaging airays with optical method to readout signal are emerging．Many advantages of the optical readout FPA fFocal Plane Array)over the monolithic counterpart the have been observed：optical readout does not need electricaI interconnects to each pixel or scanning electronics．and fabrication complexity and costs are reduced；the noise does not exponentially depend on temperature；the pixel could approach the radiation limit．But．there are stilI some shortcoming in the current system which prevent it tO be applied：l、the reflection causing by the silicon substrate significant reduce the absorptivity of radiation；2、the FPA must work in the high vacuum,3、difficult to release the microstructures and the adhesion which likely happen will cause the failure the microstructure．Directed toward the problem above，this paper gives a new optical read-out system tO measure the deformation．The thermal detector contains a focal plane array that could convert the therma】image tO the deformation of the corresponding pixel in proponion． This paper mainly gives the specially mechanical and thermal designs， microfabrication process designs of FPA．And this paper also gives the specially high-accuracy temperature controller and the integrated optical readout system，the fast liner calibration method and possible designs for future work．First，in the section of detector designs．this paper gives mechanical and thermaI designs：the experimental measurement and nurnerical simulation of the micro—cantilever deformation，the simulation of the ther