基于MEMS工艺的太赫兹滤波器的研究-电子信息材料与元器件专业论文.docxVIP

万方数据 万方数据 摘要 摘 要 太赫兹空间通信集成了微波通信与光通信的优点，具有体积小、高保密性、 定位精确、高速率以及大容量等特点，有着广阔的应用前景，因此开展太赫兹通 信研究具有非常重要的意义。 在太赫兹通信的开发和利用中，离不开太赫兹功能器件的发展，而太赫兹滤 波器作为通信系统中的重要无源器件，它的好坏直接影响了通信系统的总体指标， 其发展不容忽视。 本文研究的主要内容是太赫兹滤波器技术以及 MEMS (微电子机械系统)工 艺，在此基础上研制应用在太赫兹系统中的 140GHz 带通滤波器，其主要研究内 容如下： 1、介绍了滤波器的基本理论和设计的原理，设计了三种方案的 140GHz 的太 赫兹滤波器并对其进行了讨论确定了滤波器的结构与技术路线，然后介绍了矩形 波导滤波器的设计方法和过程。 2、介绍了制作滤波器的工艺流程，并对每一步工艺进行了分析与仿真。 3、对滤波器进行了第一次加工，对滤波器进行测试以及电镜扫描后改进了制 作工艺，进行了第二次加工，经测试滤波器达到了指标要求。 实测的滤波器指标如下，中心频率 138GHz；通带带宽 10GHz；矩形系数 40dB/3dB≤2；带内插损：≤1.5dB；带内纹波：≤0.5dB；回波损耗：≥18dB。 最后对实验结果进行了分析，提出了进一步改进及完善的措施。 关键字：MEMS 工艺、太赫兹、滤波器 I ABSTRACT ABSTRACT Terahertz space communication combines the advantages of microwave communication and optical communication. It has the characteristic of small-volume, high-security, accurate positioning, high-speed and high-capacity. It has a broad application prospect, so the research on Terahertz communication is of significant importance. Terahertz devices is very important in the development and use of terahertz communication, and terahertz filter is important in the passive components of the communication system, its quality directly affects the overall target of the communication system, and its development can not be ignored. This paper focus on Terahertz filter technology and MEMS(Micro Electro Mechanical Systems) technology, and develop 140GHz band-pass filter. The main contents of this paper are organized as follow: An introduction to basic theory and principles of design. Three design proposals of 140GHz terahertz filter are introduced and discussed, and then decide the filter’s structure and technology roadmap. After that, the methods and processes of rectangular waveguide filter design are discussed. Production of the filter’s process, and analysis the process. The first filter is produced and tested. The manufactory craft has been improved and applied to the second filter. Through a series of testing, the second filter meets the required standard. The tested filter specificat