基于MEMS技术的差分电容式加速度微传感器的研究和设计-微电子学与固体电子学专业论文.docxVIP

摘要摘要 摘要 摘要 现代信息技术的三大基础是信息采集(即传感器技术)、信息传输(通信技术) 和信息处理(计算机技术)。随着集成电路和微机械加工技术的迅速发展，微硅传 感器的研究和应用得到了极大的促进。目前在各个领域，硅微传感器正呈现商业 化、产业化的应用前景。其主要优点是：微型化、集成化、低成本、低功耗、可 靠性高等。作为传感器的一个重要分支，加速度传感器受到越来越多的关注，并 广泛应用于航空航天、工业自动化、汽车安全气囊等领域。 本文在对各种硅微加速度传感器特点进行比较的基础上，选择了差分电容式 硅微加速度传感器作为研究对象。在对其工作原理和相关制作工艺进行了阐述和 研究之后，提出了一种对称的“四梁一质量块”结构的差分电容式微加速度传感 器。与传统的弹性膜结构传感器相比，这种传感器具有更高的线性度和灵敏度。 根据建立的差分电容式微加速度传感器的力学模型，利用有限元方法对其进 行了静力学和动力学分析。通过分析，得出了在不同加速度下传感器的应力分布， 验证了该设计的有效性。同时，拟合出了悬臂梁及质量块的结构参数与质量块最 大位移量和谐振频率的关系曲线，以及质量块受迫振动的谐响应曲线。这些分析 为此类加速度计的设计提供了理论依据。最后，结合现有MEMS工艺，给出了差 分电容式硅微加速度传感器的结构尺寸、工艺流程及版图设计。 关键字：电容式加速度传感MEMS有限元分析 ABSTRACTABSTRACT ABSTRACT ABSTRACT Information collecting(sensing)，transmission(communication)and processing(cal— culating)consist of the three greatest foundation of modem information technology． With the rapid development of integrated circuit and MEMS technology,The research and application of the micro—Si sensor are greatly accelerated．At present，the micro—Si sensor is presenting the trend of commercialization and industrialization in every field． It has many advantages in bulk integration，cost，power consumption，reliability etc．As one of the important branch of sensors，acceleration sensors are paid more and more attention and be widely used in the field of navigation and aerospace，industry auto- mation，car alrbag control and SO on． In the dissertation，series types of micro-Si acceleration sensors were compared and the differential capacitive one Was chosen to bc studied．After its principle and fabrication process related were expounded，a symmetric“four cantilever beams—mass’’ structure Was proposed，which is characterized by better linearity and sensitivity compa- red with the traditional deformable．membrane sensoL After the mechanics model of the differential capacitive acceleration sensor Was made，finite element method Was used to simulate its behavior,both static and dynamic． After the simulation，the distributed stress Was lay out to validate the structure’S ability of surviving