溅射法制备CeO,2-TiO,2薄膜的结构性能研究-材料科学专业论文.docxVIP

武汉理工人学硕士学位沦文Abstract 武汉理工人学硕士学位沦文 Abstract The thesis introduces the development of coating glasses and expatiates the developing trends of energy coating glasses in future：low cost materials．high efficiency making technology，high quality and good function．CeOz-Ti 0：!complex fiIres have received abroad attention their high reflective index，excellent U1traviolet ray (uv)absorbing pz’operties．high charge—storage capacity and good electrochemical reversibility．They important materials for the coating glasses． A different Ce／Wi molar ratio is mixed，milled。and sintered with Ce02-Ti仉complex ceramic target make Ce02 fi lms，Ti晚fi lms，Ce仉一Ti仉 complex films by of RF magnetism sputter at different sputter conditions． It iS important to study the relationship between the and the properties of coating films glasses．The thesiS studies the fi lms’structures and properties by of scanning Electron microscope(SEM)，Transmission electron microscope(TEM)，X-ray photoelectron spectrometer(xPs)， Raman spectrometer， UV—viS spectrometer。Thin fiIms analysiS apparatus．and Target materialS． It is the difference of atom ordinal number·and sputter that results in Ce prior sputter and Ce／Ti molar ratio in films iS 50％more tban Ce／Ti molar rati0 in practical target design． The particle sizes of the eeOc-Ti仉complex films in nanoscale about 3-50nm．The surface of Ce02一TiOz fi lms very smooth and difficulty crystall ization．The Ce02-Ti02 complex fi lms nanocrystalline microstructure microcrystalline if to heat tlle substrates to anneal the fi lms．The Ce02 and，J’iO：nanocrystal l ine not easy congregate and bigger because of heterogenei ty interface disturb and have many defect．The nanocrystalline micrecrystalline size effect of films greatly affect to the optical characteristic of fiims． Tile indirect optical gaps of Ce仉一Ti02 complex films above 0．8 molar ratio of Ce02／Ti02 smaller，when compared with pure Ce吼fiims pure Ti仉films．The indirect optical gaps of Ce02一TiOz Eg=2．62 ±0．04 eV，Ce02films Eg=3．0