接口ASIC芯片对闭环加速度计稳定性的影响分析-微电子学与固体电子学专业论文.docxVIP

Classified Index: TP212 : 621.38 Dissertation for the Master Degree in Engineering SYSTEM STABILITY ANALYSIS OF THE CLOSED-LOOP MICROACCELEROMETER FROM INTERFACE CIRCUIT Candidate: Supervisor: Academic Degree Applied for: Specialty: Affiliation： Date of Defence: Degree-Conferring-Institution: Wang Chuang Prof. Liu Xiaowei Master of Engineering Microelectronics and Solid-State Electronics Dept. of Microelectronics Science and Technology July, 2010 Harbin Institute of Technology 哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 - - I - 摘 要 本文在分析了闭环微加速度计基本工作原理和闭环动态特性的基础上，对闭环 微加速度计的非理想模拟单元、结构阻尼、时序电路以及谐波失真对系统稳定性的 影响进行了分析，并给出一些改进方法。 闭环微加速度计的非理想单元主要包括力矩电压、前置放大器和非理想开关。 文章首先给出力矩电压在频率和幅度两种情况下对系统输出结果的影响，得出其与 灵敏度之间的关系。其次讨论了前置放大器中失调电压、转换速率以及带宽对系统 性能的影响，分别分析三种独立情况，并给出减小失调的响应方法。最后讨论了模 拟开关的非理想因素，通过 Hspice 给出合适的开关尺寸。 加速计的结构阻尼主要指压膜阻尼，文中分析了其与极板间距离变化、温度及 刻度因子之间的关系。从理论上推导了时序电路中环形振荡器由于噪声影响带来的 系统不稳定的原因，并给出表达式。 系统谐波失真主要指二次谐波和三次谐波失真。分别分析了开环模式和闭环模 式系统谐波失真，得出二次谐波要远大于三次谐波，主要消除的方法是利用电容补 偿阵列原理减小非对称电容，经过测试可知电容偏差为0.02和0.2时，二次谐波的实 测值分别为0.009%和0.042%。 关键字：闭环微加速度计；稳定性；非理想模拟单元；谐波失真 - - II - Abstract Based on analyzing the principle of the closed- loop micro accelerometer and dynamic characteristic, the analysis and optimization, including the effect from non ideal analogue unit, structural damping, sequence circuit and harmonic distortion, is presented in this thesis. The imperfect analogue unit can be classified in three main groups: the moment voltage, leading amplifier and imperfect switch. First of all, the effect of the system output from the moment voltage on frequency and amplitude is presented in the thesis, Second, the dissertation separately discusses the effect of system stability from offset voltage, slew rate and bandwidth in leading amplifier. The way of reducing system offset is presented. At last, the non ideal factor of analog switch is analyzed. By Hspice, get right switch dimension. The structural damping mainly contains squeeze damping. The relation between damping and the distance of polar pla