StudyonCharacteristicsofPeriodicMicropolarizerArray周期性微偏振.PDFVIP

Modern Physics 现代物理, 2019, 9(1), 23-31 Published Online January 2019 in Hans. /journal/mp /10.12677/mp.2019.91004 Study on Characteristics of Periodic Micropolarizer Array 1 1 1 2* 1 Xing Chen , Miao Yu , Liang Cao , Guicai Song , Zuobin Wang 1 International Research Centre for Nano Handing and Manufacturing of China, Changchun University of Science and Technology, Changchun Jilin 2 College of Science, Changchun University of Science and Technology, Changchun Jilin th th th Received: Dec. 11 , 2018; accepted: Dec. 26 , 2018; published: Jan. 4 , 2019 Abstract In this paper, the fabrication of periodic micropolarizer arrays and their polarization characteris- tics are studied. Firstly, electron beam lithography was used to fabricate periodic aluminum na- nowire grid arrays. Secondly, aluminum nanowire gratings with different depths were fabricated by focused ion beam etching. And then, the aluminum nanowire grid arrays were characterized by a polarized light path test system, and the influences of period and depth on the polarization per- formance of the polarizer were discussed. The experimental results show that the polarization performance of periodic micropolarizer arrays can be improved by appropriately reducing the period of the gratings and increasing the depth of the gratings in the visible spectrum. Keywords Micropolarizer, Focused Ion Beam Etching, Electron Beam Lithography, Aiuminum Nanowire Grid Arrays, Polarization Performance 周期性微偏振片阵列特性研究 1 1 1 2* 1 陈 星 ，于 淼 ，曹 亮 ，宋贵才 ，王作斌 1长春理工大学，国家纳米操纵与制造国际联合研究中心，吉林