基于准LIGA技术的微型齿轮型腔成形工艺研究及模具设计-机械设计及理论专业论文.docxVIP

大连理工大学硕士学谯论文摘 大连理工大学硕士学谯论文 摘 要 随着微机电系统技术的发展对微型制件需求的不断增长，以传统的微细加工方法 成形微小制l睾难以满足微系统的威愿要求，恧用微型模其成形微小制件，具寿生产效 率高，制件质量稳定等优点，成为微成形加工领域的重要工艺发展方向。 本谖题在分缕微型篱《转及微蘩模具成形特点黪基础上，全嚣分辑了冬耱擞缨麴工 方法的技术特点及其在微型模具制造中的应用状况，重点阐述了以LIGA和准LIGA 按术受代表匏毙燕z技零瓣原理及应廷，势戬此佟必本谍遂试验勰分戆骥论依据。 在试骏中，通过uV～UGA技术中的Su一8胶光刻和镍的微电铸工茳过程制作 爨了微型搬耱墼黢禳块，镶涣采麓碡5雾钢为基废，与邀铸嫩长其上豹镶屡共民稳藏墩 型齿轮型腚。同时分析总结了试验过程中的各个工艺参数对试验结果造成的影响以及 莰遂方寨。 最后对本试验所用微溅注塑模具进行了总体结构设计，清楚的分析了模具设计的 熬个蓬程隧及与警逶模其设计静不闻之囊i：，褥裂了模其熬装配圈鞠零臀圈。阂辩为了 熨好的进彳亍微型泣塑试验，采用Moldflow软件对Pp材料的注塑填充过程进行了模拟， 分橱了注瓣压力、耩溢鞫模温等工艺参数在激羹注塑填兖过程串霹能莛劐的影桶作 用。 美键词：微型模舆；UV-LIGA；徽电铸；模具设计；填究模拟 苎羔堡!!坠垫查塑壁型塑丝型些皇矍三苎堕塞墨塑墨堡生 The Process Study ofFabricating Micro Gear Cavity Based on Quasi-LIGA and Mold Design Abstract Due to the increasing demand for micro products along with the development of micro electromechnical system technology,fabricating micro products by traditional micro—machining technology Can hardly meet the requirement of microsystem． Nevertheless，fabricating micro parts employing micro-molding technology has becoming an important develop．ment trend for its high efficiency,steady quality and SO on． Based on the introduction of process characteristic of micro parts and micro molds， the machining characters of some kinds ofmicro-machining methods and their applications in micromold manufacture are discussed in general，and gives emphasis to indicate the applications and development ofLIGA and quasi—LIGA technology aS a typical lithography, as the theory ofexperiment parts in this subject． In the experiment，using UV-LIGA technology including SU·8 lithography and nickel micro—electroforming，micro gear cavity core is fabricated．The mold core is made by 45#steel substrate，making up of mold cavity with nickel layen The paper analyses and sum_marizes some parameters that tail affect experiment result． Finally,an injection micromotd is designed after analyzing the process ofmold design and comparing with general mold design，the drawing ofmold assembly and parts are also given．To optimize the experiment