二维亚波长抗反射光栅的制作及其特性分析-Core.PDFVIP

: 32 ∀#2009 30 2 LASER JOURNAL( Vol. 30. No. 2. 2009) 赵凤梅, 刘 守, 张向苏, 任雪畅 ( 厦门大学物理学系, 福建厦门 361005) : , ( ) 310nm , , : ; ; ; :TB 877 :A :0253- 2743(2009)02- 0032- 02 Fabrication and characteristic analysis of t o- dimensional anti- reflective sub avelength periodic gratings ZHAO Feng- mei, LIU Shou, ZHANG Xi ng- shu, REN Xue- ch ng ( Dep rtment of Physics, Xi men University, Xi men 361005,Chin ) Abstract:On the b se of the effective medium theory(EMT) , the nti- reflection property of subw velength cross gr tings with filling f ctors ch nging with depth is studied. Sinusoid l sh ped gr tingsf bric ted with hologr phic lithogr phy re n lyzed in det il, indic ting th t this kindof gr ting c n form the structure simil r to gr ded index nti- reflective co tings. Two- dimension l sinusoid l crossgr tings with 310 nm periodwere designed nd f bric ted using double- expo sure method, with two coherent be ms symmetric lly incident to the recording medium ( photoresist) . The result shows th t the gr ting h s enh ncedthe tr nsmis sion t visible w ve b nd, thus h s the potenti l to repl ce the tr dition l nti- reflective co tings. T king the recording medium w ith relief structures s the m s ter nd using embossing or c sting methods, the structures c n be replic ted to other m teri ls. Such nti- reflection m teri ls h ve the merits of simple f bric tion, low cost nd m ss production. Key ords: ntireflection; hologr phy; effective medium theory; subw velength periodic gr ting , ) , m i m , , , , , , 1! , ,