低温气相冷凝技术成长氧化镁锌薄膜与研制发光二极体元件.pptVIP

* * * * National Cheng Kung University Institute of microelectronics OEIC Lab. Jun. 2012 P. * ZnO-based thin film double heterostructured-ultraviolet light-emitting diodes grown by vapor cooling condensation technique Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan, Republic of China. Po-Ching Wu and Ching-Ting Lee Outline Introduction Experiments Results and discussion Conclusions The applications of the UV light： Anti-counterfeiting detectors UV treatment Air and water purification The advantages of the UV LEDs： Portable Safety Long lifetime Environmental protection －no mercury (Hg) pollution Introduction The advantages of the ZnO semiconductor： Wide direct band gap (3.37 eV) Large exciton binding energy (60 meV) Low cost, high stability, non-toxic The energy bandgap of the MgZnO film could be modulated from 3.37 eV to 7.7 eV Ref：[1] J. Phys. D: Appl. Phys., 42, 235101 (2009). [2] Appl. Phys. Lett., 86, 192911, (2005). [3] IEEE J. Sel. Top. Quantum Electron., 14, 1048 (2008). [4] IEEE Photon. Technol. Lett., 20, 2108 (2008). The common deposition methods of the MgZnO film： MOCVD [1] MBE [2] PLD [3] Sputtering [4] High-temperature process Characteristics of the ZnO and the MgO materials： [1] materials ZnO MgO energy bandgap 3.37eV 7.7eV ionic radius Zn2+ = 0.6 ? Mg2+ = 0.57? lattice constant a=3.249? c=5.207? a=4.213 ? lattice structure hexagonal wurtzite structure cubic rock-salt (NaCl) structure Ref：[1] IEEE Photon. Technol. Lett., 20, 2108 (2008). Mixed Phase Hexagonal MgZnO Cubic MgZnO Lattice structure of the MgZnO films： Ref：[1] J. Appl. Phys., 94, 7336 (2003). When the Mg content of the MgZnO films is lower than 36%, the lattice structure is still as hexagonal structure.[1] The vapor cooling condensation system Experiments Deposition layers： i-type MgZnO film i-type ZnO film n-type ZnO:In film Deposition conditions： Pressure ：10-4 torr De