利用太阳能板检测微粒子之研究.doc

利用太陽能板檢測微粒子的研究 Micro Devices for Particle Detection Using Photovolatic Cell 研究生:許瑋恩 Shu, Wei-En 指導教授:王耀男 Wang, Yao-Nan 【摘要】 本研究利用低成本的太陽能板(Photovolatic Cell)取代光檢測器，並結合微影製程技術所製作的poly-dimethylsiloxane(PDMS)微流體晶片來檢測微粒子前散射光訊號，當粒子通過檢測區域時，利用太陽能板來接收前向小角5o、8o、10o之前散射光訊號。本研究成功的檢測聚苯乙烯5 μm、8 μm、10 μm及15 μm四種不同粒徑螢光粒子的前散射光訊號，太陽能板檢測之前散射光訊號經由APD之螢光訊號來驗證本檢測系統精確性與可靠性，其前散射光訊號與螢光訊號為一對一對應。在前向小角5o、8o、10o之前散射光訊號檢測中，以前散射光角度5o之檢測效果為最佳，各尺寸粒子訊雜比(S/N ratio)分別為3.42、8.86、10.59、24.97，粒子前散射光訊號之線性迴歸R2達0.967，CV值介於20% – 30%。 當粒子通過檢測區域時，粒子阻擋雷射激發光所產生的前散射光訊號表示粒子總數量和尺寸大小，而雷射誘導螢光檢測(Laser Induced Fluorescence, LIF)是螢光粒子通過時，利用回傳的螢光訊號顯示螢光粒子的數量。在經由本系統檢測出粒子的前散射光及反射螢光作成點狀圖，來觀察出不同大小粒徑粒子分佈，另外利用5 μm與10 μm螢光粒子與7.26 μm非螢光粒子混合來進行測試，本系統成功分辨混合粒子大小及螢光/非螢光粒子。本研究所開發之技術可運用於即時檢測車輛廢氣懸浮粒子(PM)及機油中金屬微粒子，也使用於生物醫學分析中。 關鍵字：微影製程技術、太陽能板、雷射誘導螢光技術、前散射光訊號、螢光訊號 【Abstract】 This study describes a low cost photovolatic cell photo-detector for particles forward scattered light detection. The system integrates a commercial Photovolatic cell and a poly-dimethylsiloxane (PDMS) microfluidic chip that is fabricated using soft lithography processes for particle forward scattered light detection. The particles forward scattered light signal was confirmed utilizing laser-induced fluorescence detection system. In the detection system, the small forward scattered light signals of small-angle 5°, 8° and 10° were received by the proposed photovoltaic cell. In this research, the forward scattered light signals of different particle sizes of 5 μm、8 μm、10 μm and 15 μm were detected utilizing low cost commercial photovoltaic cell. In order to demonstrate the accuracy and reliability of the detection system, the forward scattered signal of Photovolatic cell was compared with fluorescence signal of APD, both of the signals are corresponding one by one simultaneously. In the forward scattered light detect results of small-angle of 5°, 8° and 10°, the S/N ratio is optimal in the test result of 5° forward scattered angle. Four different sizes of 5 μm、8 μm、