精密仪器课程设计报告.docVIP

精密仪器课程设计 陈静 1001170101 设 计 报 告 设计名称：精密仪器课程设计 学生姓名：陈静 学号：1001170101 地 点：机械楼420 时 间： 年 月 日 ～ 年 月 日 提交报告日期： 年 月 日 成绩与评语： 指导教师签名： 南京理工大学机械工程学院  课程设计报告摘要 摘 要：本设计采用柔性铰链精密工作台、电致伸缩微位移器驱动、电容式位移传感器测量、微机控制方案，对精密微动工作台的静、动态特性进行测试。本设计报告中阐述了微位移技术的应用及国内外发展状况和该系统设计的原理及其测试方法，并给出了实验结果。 关键词：柔性铰链 电致伸缩微位移器 电容位移传感器 微机控制 特性测试 Abstract: This design adopts the flexible hinge precision worktable, the electric circuit displacement device driver, capacitive displacement transducer to measure and the microcomputer control system. It also tests static and dynamic characteristics of the precision micro bench. This design report expounds the micro displacement technology application and development situation at home and abroad, principle of the system design and the test method. It also give the experimental results . Key words: the flexible hinge the electric circuit displacement device capacitive displacement transducer microcomputer control test characteristics 目 录 1 引言····························································· 1 1.1 课程设计背景··············································· 1 1.2 微位移技术的应用及国内外发展现状··························· 1 1.2.1 微位移技术的应用······································ 1 1.2.2 微位移技术在国内外发展现状···························· 2 2 精密微动工作台总体设计方案·······································3 2.1 导轨形式——以柔性铰链为基本单元的弹性导轨·················4 2.1.1 柔性铰链的特性········································4 2.1.2 双柔性平行四连杆机构··································4 2.1.3 微动工作台设计计算公式································5 2.2 驱动方式——电致伸缩式····································· 6 2.2.1 电致伸缩效应··········································6 2.2.2 电致伸缩材料··········································6 2.2.3 电致伸缩器件··········································6 2.2.4 电致伸缩陶瓷驱动器设计方案····························7 2.3 测量方案——电容式传感器···································8 2.3.1 变极距型平板电容式传感器····