皮秒激光工程应用研究现状与发展分析.docxVIP

DOI 10.3901/JME.2014.05.115皮秒激光工程应用研究现状与发展分析*季凌飞凌 晨李秋瑞吴燕闫胤洲鲍 勇蒋毅坚(北京工业大学激光工程研究院 北京 100124)摘要：皮秒激光作为一种新型的能量源，具有皮秒级(?10 ps =10–11s)超短脉宽、重复频率可调范围宽和高脉冲能量等特点， DOI 10.3901/JME.2014.05.115 皮秒激光工程应用研究现状与发展分析* 季凌飞 凌 晨 李秋瑞 吴 燕 闫胤洲 鲍 勇 蒋毅坚 (北京工业大学激光工程研究院 北京 100124) 摘要：皮秒激光作为一种新型的能量源，具有皮秒级(?10 ps =10–11s)超短脉宽、重复频率可调范围宽和高脉冲能量等特点， 有望实现包括硬脆性难加工材料在内的高精与高效兼顾的材料加工效果，在材料精细与微纳加工领域已逐步显露头角。介绍 了皮秒激光与材料相互作用的基本特点和区别于其他类型激光加工的优势，总结综述近年来国内外皮秒激光在材料切割、选 择性去除、深微孔加工和型面加工等几个面向工程实际应用研究的最新进展，对皮秒激光在工业领域未来应用中所面临的问 题和发展方向进行分析与预测。皮秒激光的工程应用作为新型激光智能化制造手段之一将在高精高效机械制造领域具有广阔 的应用前景。 关键词：皮秒激光；工程应用；高精与高效加工 中图分类号：TG485；V261 Research Progress and Development of Industrial Application of Picosecond Laser Processing JI Lingfei LING Chen LI Qiurui WU Yan YAN Yinzhou BAO Yong JIANG Yijian (Institute of Laser Engineering, Beijing University of Technology, Beijing 100124) Abstract：As a novel energy source, picosecond laser has attracted more and more attention because of its ultra-short pulse width (? 10 ps = 10–11s), wide repetition frequency range (a few tens of Hz-MHz) and high pulse energy. It is expected to achieve high precise and efficient laser processing of materials, particularly the hard and brittle materials, which has been gradually promising in manufacturing industry. The principle and characteristics of picosecond laser interaction with materials which are different from other kinds of laser are introduced. The latest research on picosecond laser cutting, surface selective removal, drilling and milling which are the most promising techniques for industrial application are presented and analyzed. The challenges and future trends of the development of picosecond laser application in industry are also presented and predicted. Industrial application of picosecond laser can be widely used in the high efficient and precise mechanical manufacturing field as one of the advanced laser processing techniques. Key words：picosecond laser；industrial application；high precise and efficient processing 除。“热加工”效应所引起的