光波导器件边缘的高精度直线检测.pdfVIP

第 48 卷第 7 期 中南大学学报( 自然科学版) Vol.48 No.7 2017 年 7 月 Journal of Central South University (Science and Technology) July 2017 DOI: 10.11817/j.issn.1672-7207.2017.07.007 光波导器件边缘的高精度直线检测 吕文，郑煜，王丽军，李继攀，段吉安 ( 中南大学 高性能复杂制造国家重点实验室，湖南 长沙，410083) 摘要：为了在光波导器件对准中快速、准确地检测波导边缘直线，保证检测精度，提出一种高精度快速边缘直线 检测方法。其步骤为：分析光波导器件对准的机器视觉系统及其精度要求；通过对耦合界面灰度分布的一阶导数 进行拟合求峰值位置提取亚像素边缘点；基于 RANSAC 算法和 OLS 算法相结合的方法对提取的边缘进行高精度 直线拟合，并以此计算波导的位姿参数。研究结果表明：本算法检测角度误差小于 0.003˚，距离误差小于0.1 像素， 运算时间小于 0.5 s，能精确拟合带有破损、脏污等噪声因素的波导边缘，实现光波导器件边缘的高精度直线检测。 关键词：直线检测；光波导器件；亚像素边缘；RANSAC 算法 中图分类号：TP391 文献标志码：A 文章编号：1672−7207(2017)07−1734−07 High-precision line detection of optical waveguide devices edge LÜ Wen, ZHENG Yu, WANG Lijun, LI Jipan, DUAN Ji’an (State Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha 410083, China) Abstract: In order to detect the waveguide edges accurately and quickly in the alignment of optical waveguide devices and ensure the detection precision, a high-precision fast line detection method was proposed. The procedures were as follows. Firstly, the machine vision system and accuracy requirement of waveguide devices alignment were analyzed. Secondly, the subpixel edge points were extracted through fitting the first derivative of gray value distribution of coupling interface and solving the peak value. Lastly, the fitting method based on the RANSAC and OLS algorithm was applied in the extracted pixels to obtain the fitting lines, and the waveguide posture parameters were computed subsequently