固结磨料抛光K9光学玻璃的工艺试验研究.pdf

47, 04 1603 (20 10) 2010 中国激光杂志社 doi: 10.3788/lop47.041603 结磨料抛光K9 光学玻璃的工艺实验研究 魁 朱永伟 李 军 李 茂 李锁柱 (南京航空航天大学机电学院， 江苏 南京 2 10016) 摘要 采用一种亲水性固结磨料抛光垫(FAP)，通过单因素实验法，系统地研究了抛光K9 光学玻璃过程 抛光时间、 偏心距、压力、转速、抛光液流量及pH 值等工艺参数对材料去除速率(MRR)和表面粗糙度的影响规律，并对实验结 果进行了解释。结果表明：随 抛光时间的延长，K9 光学玻璃的MRR 逐渐呈下降趋势；在抛光20 min 时，MRR 达 最大值310 nm/min，且表面粗糙度降至最低值为2.73 nm ；选择较大的偏心距和碱性抛光液环境均有利于提高MRR ； 随 抛光盘转速的升高，MRR 将显著增大。而在一定范围内，抛光压力和抛光液流量对MRR 的影响不大。 关键词 K9 光学玻璃；固结磨料抛光垫；抛光工艺；单因素实验 中图分类号 TN05;TG74 OCIS 160.2750 220.5450 文献标识码 A Experimental Study on Polishing Technology of K9 Optical Glass with Fixed Abrasive Pad Lin Kui Zhu Yongwei Li Jun Li Mao Li Suozhu (College of Mechanical and Electrical Engineering, Nanj ing University of Aeronautics and Astronautics, Nanj ing, Jiangsu 2 100 16, China) Abstract A new hydrophilic fixed abrasive polishing pad (FAP) was studied. Single factor experiment method was employed to explore the effect of polishing parameters such as polishing time, eccentricity, pressure, rotational speed, flow rate and pH value of slurry with FAP on material removal rate (MRR) and surface roughness of K9 optical glass. Results show that MRR drops with time extension. After 20 min polishing, MRR reaches a maximum of 310 nm/min and surface roughness reaches a minimum of 2.73 nm. Large eccentricity distance and alkaline slurry are helpful to improve MRR. With the increase of rotational speed, MRR rises significantly. While in certain range, applied pressure and slurry flow rate have little effect on MRR. Key words K9 optical glass; fixed abrasive pad; polishing parameter; single factor experiment 1 引 言 随 国防工业和尖端技术的飞速发展，对脆性材料(如光学玻璃、陶瓷等) 的超精密加工需求日益增