2常见MEMS工作原理.pptVIP

微机电系统（2） 微传感器和微执行器 Definitions Transducer A device that converts from one physical quantity to another. Sensor A device that converts one physical or chemical quantity to an electrical one. Actuator A device which converts an electrical quantity into a physical or chemical one. Definitions of sensors A sensor, a transducer, transmitter and detector or often used as synonyms. They are devices that convert one form of energy into another and provide the user with a usable energy output in response to a specific measurable input.. 常用的一次变换 * Transducer Output Control Integrated sensor Smart