半导体照明课件 8 第8章 AlGaInP 发光二极管.pptVIP

* * * * As mentioned before, small changes of a few degrees in the temperature may cause severe changes in the composition and therefore the optical properties of a grown layer. Temperature variations of 10 degrees or more make the whole run useless. However, it is important to realize, that the knowledge and the control of the absolute temperature on the wafer is not that important. Whatever temperature delivers good results needs to be kept constant and to needs to be reproduced. There is a large difference between the temperatures at the top of the wafer and the bottom of the susceptor or i