膜基体系压痕响应的基底效应研究.docVIP

PAGE PAGE 27 膜基体系压痕响应的基底效应研究 摘要 随着近代科学技术的迅速发展，我国在材料科学领域中也取得了巨大进步。薄膜材料从最初的科学研发阶段，现今以广泛应用于工业生产（汽车、航海、航天等领域），开始走进人们的日常生活中去。故对薄膜材料自身性能的科学研究，对其各项性能的挖掘和提升均变得越来越重要。先如今对薄膜材料的力学性能测试研究多采用纳米压痕技术。纳米压痕技术因为其快捷、便利、精确度良好等特点使之被广泛应用于各领域的科学研究实验中。但是因为薄膜材料纳米级的厚度使其与块体材料的压痕实验不同，压痕过程中基底效应的存在会对实验结果产生极大的影响，如何在加入基底效应影响因素条件下的同时科学精确的研究薄膜材料的力学性能已经成为材料科学领域中需要突破的科研瓶颈之一。本篇论文通过以幂函数的形式来拟合薄膜材料压痕实验过程中的加载曲线，之后运用ABAQUS有限元模拟软件建立其关于加载曲线的无量纲方程，模拟运算求解得出其无量纲方程的表达形式，最后通过正向和反向分析来验证实验方法的科学性和严谨性。从而我们能够通过运算得出的加载曲线指数其值得大小来反映出基底效应对实验研究结果的影响大小。 关键词：有限元模拟、纳米压痕、横观各向同性薄膜材料、正向分析、反向分析、 无量纲方程 ABSTRACT With the rapid development of modern science and technology, our country has made great progress in the field of material science. Thin film materials from the initial stage of scientific research and development, now widely used in industrial production (automotive, marine, aerospace and other fields), began to walk into peoples daily life. Therefore, the research on the properties of thin film materials is becoming more and more important. Nowadays, the mechanical properties of the film materials are studied by the methods of nano indentation experiment, because of its fast, convenient and high precision. But because the thickness of the film of nanometer materials make it different from bulk materials indentation experiments, the indentation in the process of substrate effect will has a great impact on the experimental results, how to in consideration of the influence factors for the substrate effect at the same time, accurate science of thin films materials mechanical properties has become one of the major issues in the field of materials science. Loading curve fitting thin film materials during an indentation experiment in the form of power function by this thesis, followed by the use of the ABAQUS finite element simulation software to establish the on load curve dimensionless equation, simulation calculation is obtained the dimensional equation of concrete expressions. Finally, through positive analysis and reverse