SEMI E4-0699 SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER协议原版文件.docxVIP

PAGE 11 PAGE 11 SEMI E4-0699 ? SEMI 1980, 1999 SEMI SEMI E4-0699 ? SEMI 1980, 1999 PAGE 10 SEMI E4-0699 SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-I) This standard was technically approved by the Global Information Control Committee and is the direct responsibility of the North American Information Control Committee. Current edition approved by the North American Regional Standards Committee on February 28, 1999. Initially available on SEMI OnLine May 1999; to be published June 1999. Originally published in 1980; previously published January 1999. Introduction Revis