SEMI E30-1000 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL协议原版文件.docxVIP

PAGE 11 PAGE 11 SEMI E30-1000 ? SEMI 1992, 2000 SEMI E30-1000 ? SEMI E30-1000 ? SEMI 1992, 2000 PAGE 10 SEMI E30-1000 GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) This standard was technically approved by the Global Information Control Committee and is the direct responsibility of the North American Information Control Committee. Current edition approved by the North American Regional Standards Committee on July 14 and August 28, 2000. Initially available at August 2000; to be published October 2000. Originally published in 1992; previously published