SEMI E37-0298 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC协议原版文件.docxVIP

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SEMI E37-0298 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC协议原版文件.docx

PAGE 11 PAGE 11 SEMI E37-0298 ? SEMI 1995, 1998 SEMI SEMI E37-0298 ? SEMI 1995, 1998 PAGE 10 SEMI E37-0298 HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES Purpose HSMS provides a means for independent manufactur- ers to produce implementations which can be con- nected and interoperate without requiring specific knowledge of one another. HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed commu- nication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other

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