EasyScan AFM（Nanosurf）和Nanoscope多模SPM（Veeco）的形貌扫描.ppt

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2024-09-02 发布于北京
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EasyScan AFM（Nanosurf）和Nanoscope多模SPM（Veeco）的形貌扫描.ppt

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ComparativeData:

TopographicScanson

EasyScanAFM(Nanosurf)

and

NanoscopeMultimodeSPM(Veeco)

SpecificationsSpecificationEasyScanNanoscopeMultimodeSPM(using“J”scanner)MaximumX-YScanRange60-80μm125μmMaximumZ-Range20μm5μmResolutionScanrange/16bits16bitresolutiononallthreeaxes,with3independent16bitDACsMaxSamples/Line1024(imagestakenat512)512x512pixels

TimeRC(Torr)Tc(?C)TGa(?C)TSi(?C)RFCommentsO-2.14×10907↑1150150/0spottyO+1.98×10-5↑580(40?C/min)1007/907↑1150150/0~2m15s1.98×10907150/0Streak~3m38s1.98×10907150/0Streak~28m24s2.02×10-5580↓980/880↑1295150/0Pausegrowth↓150W,wait4mResumegrowth~1h5m56s2.07×10-5580980/880150/0streak:stop,wait13s~1h6m9s2.07×10-5580980/880150/0openSi75s~1h7m24s2.07×10-5580980/880150/0streak:closeSistreak:wait6s~1h7m30s2.08×10-5580980/880↓900150/0OpenGa,streak~1h21m60s2.08×10-5580980/880150/0CloseGa,NSample060805a Si-δ-dopedGaNGa:Temperature1007/907,Flux6.81×10-8

UIDGaN25nm:14m30sSi–δ–layer75sUIDGaN64nm:37m12sUIDGaN86nm:28m24sGaNsubstrateInmountedonSiCross-sectionof060805a

EasyScanheightvariance2.76nmScanSize:1μmNanoscopeheightvariance4.00nmFigure1.0Figure1.1

EasyScanheightvariance3.07nmScanSize:2.5μmNanoscopeheightvariance4.75nmFigure1.2Figure1.3DislocationDensity:42colums/6.3x10-8cm2=6-7x108/cm2

EasyScanheightvariance3.07nmScanSize:5.0μmNanoscopeheightvariance6.00nmFigure1.4Figure1.5

EasyScanheightvariance7.37nmScanSize:10.0μmNanoscopeheightvariance10.00nmFigure1.6Figure1.7

TimeRC(Torr)Tc(?C)TGa(?C)TSi(?C)RFCommentsO-2.20×10907↑1200(10?C/m)150/0O+2.07×10-5↑580(40?C/min)1007/907150/0openGa,N,rotcw10~3m40s2.02×10907150/0Streak~28m24s2.02×10-5580↓980/880150/0streak,pause↓150W,wait4min,streak2.23×10-5580980/880↑1280150/0resumegrowth~1h5m46s2.09×10-5580980/880150/