碳膜制备及应用研究进展_马名杰 - 副本 .pdfVIP

第27卷第6期河南理工大学学报(自然科学版)Vol.27No.6

2008年12月JOURNALOFHENANPOLYTECHNICUNIVERSITY(NATURALSCIENCE)Dec.2008

马名杰1,张爱芸2

(1.河南理工大学材料科学与工程学院,河南焦作454003;2.河南理工大学物理化学系,河南焦作454003)

摘要:碳膜是一类很有发展和应用前景的新型材料,其优良的性能受到了广泛关注.本文评

述了国内外近年来掺金属粒子碳膜、类金刚石碳膜、气体分离用碳膜、纳米碳膜等的制备方

法及各自应用领域的研究进展,探讨了影响碳膜性能的因素,介绍了碳膜结构和性能的表征

方法.作者认为,未来几年内对碳膜的制备研究和应用开发研究还将会进一步深入和发展,

研究应致力于简化碳膜的制备过程、寻求廉价易得的用于碳膜制备的碳源,同时更加关注碳

膜的应用开发.

关键词:碳膜;制备;表征;类金刚石碳;类石墨碳

中图分类号:O648文献标识码:A文章编号:1673-9798(2008)06-0696-05

Advancesinpreparationandapplicationofcarbonfilms

12

MAMing-jie,ZHANGAi-yun

(1InstituteofMaterialScienceandEngineering,HenanPolytechnicUniversity,Jiaozuo454003,China;2.DepartmentofPhsicalandChemis-

try,HenanPolytechnicUniversity,Jiaozuo454003,China)

Abstract:Carbonfilmsisanewtypematerialwhichhasbrightfutureinthedevelopmentandapplication.It

isexcellentperformancearewidelyconcerned.Thecommentsofthecarbonfilmspreparation,inrecent

years,suchasapplicationofmetal-containingcarbonfilms,diamondlikecarbonfilms,carbonfilmsfor

gasseparationandnanostructuredcarbonfilmsaregiveninthepaper.Theinfluencingfactorsandthecharac-

terizationmethodsofthestructureandperformanceofcarbonfilmsweresummarized.Innextfewyears,the

carbonfilmsresearchesandapplicationwillbefurtherdeveloped,theprocessesofcarbonfilmsspreparation

aredevotedtosimplified,andmorecheapercarbonsourceisseekedforthecarbonfilms.Meanwhiletheap-

plicationofcarbonfilmsshouldbemorefocused.

Keywords:carbonfilms;fabrication;charac